Accurate in situ lattice matching from the dynamics of high energy electron diffraction

Applied Physics Letters

Volumn 68, Issue 3, 1996, Pages 394-396

  Cunningham, J E ^a   Pathak, R N ^a   Jan, W Y ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345631500     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116696     Document Type: Article

References (6)

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2. J. E. Cunningham, R. N. Pathak, and W. Y. Jan, Electron. Mater. Conference, Boulder, CO, 1994.
3. J. H. Neave, B. A. Joyce, P. J. Dobson, and N. Norton, Appl. Phys. A 31, 1 (1983); J. M. Van Hove, C. S. Lent, P. R. Pukite, and P. I. Cohen, J. Vac. Sci. Technol. B 1, 741 (1983).
4. T. H. Chiu and S. N. G. Chu, Appl. Phys. Lett. AIP 57, 1425 (1990).
5. R. F. Kopf, J. M. Kuo, and M. Ohring, J. Vac. Sci. Technol. B 9, 1920 (1991).
6. G. W. Turner, B. A. Nechay, and S. J. Eglash, J. Vac. Sci. Technol. B AIP 8, 283 (1990).