An ion-beam apparatus for the formation of oxide films by the oxygen ion sputtering technique

Pribory i Tekhnika Eksperimenta

Volumn 44, Issue 3, 2001, Pages 151-154

  Stognij, A I ^a   Svirin, V T ^b   Tushina, S D ^b   Novitskii, N N ^b   Protazanova, T M ^b  

^a KBTEM OMO   (Belarus)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; ION SOURCES; OPERATIONS RESEARCH; OXIDES; OXYGEN; SPUTTERING;

OXIDE FILMS;

TARGETS;

EID: 0345550543     PISSN: 00328162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)