Investigation on adsorption state of surface adsorbate on silicon wafer

Rare Metals

Volumn 18, Issue 2, 1999, Pages 111-112

  Yuling, Liu ^a   Na, Liu ^b   Yang, Cao ^c  

^a HEBEI UNIVERSITY OF TECHNOLOGY   (China)

^b Beijing Petrochem Eng Company   (China)

^c Beijing Century Robust Technology Co Ltd   (China)

Author keywords

Adsorption; Kinetics; Mathematical model

Indexed keywords

EID: 0345529282     PISSN: 10010521     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. O'mara W C. Int. Semiconductor, 1994, 17(8): 140.
2. Singer P. Int. Semiconductor, 1994, 17(2): 48.
3. De Larios J M. Int. Semiconductor, 1996, 19(5): 121.
4. Myeis TL Fury MA, Krusell W C. Solid State Technol, 1995, 38(10): 59.