Optimizing the triggering mode for stable operation of a pulsed cathodic arc deposition system

Plasma Sources Science and Technology

Volumn 12, Issue 4, 2003, Pages 508-512

  Gan, B K ^a   Bilek, M M ^a   McKenzie, D R ^a   Swift, P D ^b   McCredie, G ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DEPOSITION; ELECTRIC ARCS; ELECTRIC CURRENTS; FILM GROWTH; VOLTAGE MEASUREMENT;

EDGE TRIGGERING; PULSED CATHODIC ARC;

PLASMAS;

EID: 0345446697     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/4/302     Document Type: Article

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