Self-consistent simulation of a planar electron-cyclotron-wave-resonance discharge

Journal of Applied Physics

Volumn 81, Issue 11, 1997, Pages 7163-7169

  Krimke, Ralf ^a   Urbassek, Herbert M ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345439730     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365314     Document Type: Article

References (21)

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