Conoscopic interferometry of wafers for surface-acoustic wave devices

Journal of Applied Physics

Volumn 82, Issue 8, 1997, Pages 4039-4042

  Ayras P ^a   Friberg, A T ^b,c   Kaivola, M ^a   Salomaa, M M ^a  

^a AALTO UNIVERSITY   (Finland)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^c UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345436636     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365755     Document Type: Article

References (7)

1. S. Jen and C. S. Hartmann, IEEE Ultrasonic Symposium Proceedings, 1994, pp. 397-401.
2. K. Ohtsuka, H. Ara, and T. Ogawa, Jpn. J. Appl. Phys., Part 1 23, 1541 (1984).
3. X. Zhou and X. Xu, Cryst. Res. Technol. 31, K9 (1996).
4. N. H. Hartshorne and A. Stuart, Practical Optical Crystallography (Edward Arnold, London, 1969).
5. D. P. Morgan, Surface-Wave Devices for Signal Processing (Elsevier, Amsterdam, 1991).
6. M. Born and E. Wolf, Principles of Optics (Pergamon, Oxford, 1980).
7. Handbook of Chemistry and Physics, edited by R. C. Weast (CRC, Bora Raton, FL, 1986).