Vibration-Mode Analysis of an RF Film-Bulk-Acoustic-Wave Resonator by Using the Finite Element Method

Journal of the Korean Physical Society

Volumn 43, Issue 5 I, 2003, Pages

  Jung, Jae Ho ^a   Lee, Yong Hyun ^b   Lee, Jung Hee ^b   Choi, Hyun Chul ^b  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Film bulk acoustic wave resonator; Finite element; RF

Indexed keywords

EID: 0345413465     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.43.648     Document Type: Article

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