Designing low pressure systems with continuum models

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1252-1257

  Singh, Vikram ^a   Berney, Butch ^a   Krishnan, Anantha ^b  

^a LAM RESEARCH CORPORATION   (United States)

^b CFD RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345369852     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579937     Document Type: Article

References (10)

1. P. K. Shufflebotham, T. J. Bartel, and B. Berney, J. Vac. Sci. Technol. B 13, 1862 (1995).
2. N. Zhou, A. Krishnan, and A. J. Przekwas, presented at the 31st AIAA/ ASME/SAE/ASEE Joint Propulsion Conference, San Diego, CA, 10-12 July 1995 (unpublished).
3. M. Giridharan, S. Lowry, and A. Krishnan, to be presented at the International Mechanical Engineering Congress and Exposition, San Francisco, CA, November 1995 (unpublished).
4. M. Giridharan and A. Krishnan, presented at the 26th AIAA Fluid Dynamics Conference, San Diego, CA, 19-22 June 1995 (unpublished).
5. A. Krishnan and N. Zhou, presented at the Fourth ASME/JSME Thermal Engineering Joint Conference, Hawaii, 19-24 March 1995 (unpublished).
6. N. Zhou and A. Krishnan, presented at the 33rd Aerospace Sciences Meeting, Reno, NV, 9-12 January 1995 (unpublished).
7. A. Krishnan, N. Zhou, and A. J. Przekwas, presented at the I-THERM Meeting, Washington, DC, 4-7 May 1994 (unpublished).
8. A. Krishnan, N. Zhou, G. Mo, and A. J. Przekwas, presented at the Materials Research Society Spring Meeting, San Francisco, 4-8 April 1994 (unpublished).
9. R. C. Reid, J. M. Prausnitz, and B. E. Poling, The Properties of Gases & Liquids (McGraw-Hill, New York, 1987).
10. S. Plimpton and T. Bartel, Proceedings of the Scaleable High Performance Computing Conference, Williamsburgh, VA, 1992 (IEEE, Washington, DC, 1992), p. 212.