Dielectrophoresis and electrohydrodynamics-mediated fluidic assembly of silicon resistors

Applied Physics Letters

Volumn 83, Issue 18, 2003, Pages 3833-3835

  Lee, S W ^a   Bashir, R ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC RESISTANCE; ELECTROHYDRODYNAMICS; ELECTROPHORESIS; GOLD; RESISTORS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS; WATER;

CURRENT VOLTAGE MEASUREMENT; DEIONIZED WATER; DIELECTROPHORESIS; FLUIDIC ASSEMBLY; GOLD CHROMIUM LAYERS; SILICON ON INSULATOR WAFER; SINGLE CRYSTAL SILICON DEVICES;

SEMICONDUCTING SILICON;

EID: 0345359868     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1624642     Document Type: Article

References (11)

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