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Volumn 63, Issue 5, 2003, Pages 1737-1763

The radio-frequency driven plasma sheath: Asymptotics and analysis

Author keywords

Plasma; Sheath

Indexed keywords

ASYMPTOTIC STABILITY; CARRIER CONCENTRATION; IONIZATION; OPTIMIZATION; PLASMA DENSITY; VARIATIONAL TECHNIQUES;

EID: 0345327612     PISSN: 00361399     EISSN: None     Source Type: Journal    
DOI: 10.1137/S0036139902411831     Document Type: Article
Times cited : (11)

References (10)
  • 2
    • 0001027394 scopus 로고
    • Dynamic model of the electrode sheaths in symmetrically driven discharges
    • V. A. GODYAK AND N. STERNBERG, Dynamic model of the electrode sheaths in symmetrically driven discharges, Phys. Rev. A, 42 (1990), pp. 2299-2312.
    • (1990) Phys. Rev. A , vol.42 , pp. 2299-2312
    • Godyak, V.A.1    Sternberg, N.2
  • 3
    • 0000346057 scopus 로고
    • Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges
    • N. STERNBERG AND V. A. GODYAK, Solving the mathematical model of the electrode sheath in symmetrically driven rf discharges, J. Comput. Phys., 111 (1994), pp. 347-353.
    • (1994) J. Comput. Phys. , vol.111 , pp. 347-353
    • Sternberg, N.1    Godyak, V.A.2
  • 4
    • 0001613578 scopus 로고
    • Comparison of a consistent theory of radio frequency sheaths with step models
    • J. GIERLING AND K.-U. RIEMANN, Comparison of a consistent theory of radio frequency sheaths with step models, J. Appl. Phys., 83 (1988), pp. 3521-3528.
    • (1988) J. Appl. Phys. , vol.83 , pp. 3521-3528
    • Gierling, J.1    Riemann, K.-U.2
  • 5
    • 0014778076 scopus 로고
    • Asymptotic matching of plasma and sheath in an active low pressure discharge
    • R. N. FRANKLIN AND J. R. OCKENDON, Asymptotic matching of plasma and sheath in an active low pressure discharge, J. Plasma Phys., 4 (1970), pp. 371-385.
    • (1970) J. Plasma Phys. , vol.4 , pp. 371-385
    • Franklin, R.N.1    Ockendon, J.R.2
  • 6
    • 0028483007 scopus 로고
    • Plasma carburization of an axisymmetric steel sample
    • M. GEGICK AND G. W. YOUNG, Plasma carburization of an axisymmetric steel sample, SIAM J. Appl. Math., 54 (1994), pp. 877-906.
    • (1994) SIAM J. Appl. Math. , vol.54 , pp. 877-906
    • Gegick, M.1    Young, G.W.2
  • 7
    • 0036906052 scopus 로고    scopus 로고
    • 2 + x and their role in the stability of the plasma-sheath transition
    • 2 + x and their role in the stability of the plasma-sheath transition, European J. Appl. Math., 13 (2002), pp. 663-680.
    • (2002) European J. Appl. Math. , vol.13 , pp. 663-680
    • Slemrod, M.1
  • 8
    • 0041028921 scopus 로고    scopus 로고
    • On Boutroux's tritronquée solutions of the first Painlevé equation
    • N. JOSHI AND A. V. KITAEV, On Boutroux's tritronquée solutions of the first Painlevé equation, Stud. Appl. Math., 107 (2001), pp. 253-291.
    • (2001) Stud. Appl. Math. , vol.107 , pp. 253-291
    • Joshi, N.1    Kitaev, A.V.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.