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Volumn 4977, Issue , 2003, Pages 602-608
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Laser direct-write of metal patterns for interconnects and antennas
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Author keywords
Conformal antennas; Laser direct write; Laser forward transfer; Laser micromachining
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Indexed keywords
ANTENNAS;
COMPUTER AIDED DESIGN;
COMPUTER CONTROL;
DEPOSITION;
INTEGRATED CIRCUIT LAYOUT;
MICROELECTRONICS;
MICROMACHINING;
PHOTOLITHOGRAPHY;
POLYIMIDES;
RAPID PROTOTYPING;
CONFORMAL ANTENNA;
CONFORMAL PATTERNING;
LASER DIRECT WRITE;
LASER FORWARD TRANSFER;
LASER MICROMACHINING;
METAL PATTERNS;
LASER APPLICATIONS;
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EID: 0345293218
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.479407 Document Type: Conference Paper |
Times cited : (19)
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References (10)
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