Micromachines Made by Silicon Technology. Integrated Sensor and Actuator Systems by Micromaching.

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

Volumn 62, Issue 594, 1996, Pages 417-422

  Esashi, Masayoshi ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345024000     PISSN: 03875024     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaic.62.417     Document Type: Article

References (11)

1. Terry, S. C., Jerman, J. H. and Angell, J. B. A Gas Chromatographic Air Analyze Fabricated on a Silicon Wafer. IEEE Trans. on Electron Devices. ED 26(1979), 1880-1886.
2. Tew, C., Electronic Control of a Digital Micromirror Device for Projection Displays, Proc. of IEEE International Solid State Circuits Conf., (1994), 130-131.
3. Matsumoto, Y. and Esashi, M., Integrated Silicon Capacitive Accelerometer with PLL Servo Technique, Sensors and Actuators, A39(1993), 209-217.
4. Jono, K., Hasimoto, M. and Esasih, M., An Electrostatic Servo type Three axis Silicon Accelerometer, Meas. Sci. Technol., 6(1994), 11-15.
5. Choi, J., Minami, K. and Esashi, M., Silicon Resonant Angular Rate Sensor by Reactive Ion Etching, Tech. Digests of 13th Sensor Symp., Tokyo, (1995), 163-166.
6. Hatanaka, K., Sim, D. Y., Minami, K. and Esashi, M., Silicon Diaphragm Capacitive Vacuum Sensor. Tech. Digests of 13th Sensor Symp., Tokyo, (1995), 37-40.
7. Cabuz, C., Shoji, S., Fukatsu, K., Cabuz, E., Minami, K. and Esashi, M., Fabrication and Packaging of a Resonant Infrared Sensor Integrated in Silicon, Sensors and Actuators, A43(1994), 92-99.
8. Asada, N., Matsuki, H. and Esashi, M., Silicon Micromachined Two dimensional Galvano Optical Scanner, IEEE Trans. on Magnetics, 30(1994), 4647-4649.
9. Sim, D. Y., Kurabayashi, and Esashi, M., Bakable Silicon Pneumatic Microvalve, Digests of Technical Papers Transducers’95, Stockholm, (1995), 280-283.
10. Lim, G., Minami, K., Sugihara M., Uchiyama, M. and Esashi, M., Active Catheter with Multi link Structure Based on a Silicon Micromachining. Proc. IEEE MEMS’95, Amsterdam, (1995), 116-121.
11. Park, K., Minami, K. and Esashi, M., Integrated Communication and Control Circuit for Multi Link Active Catheter, The 6th Conf. on Sensor Technology in Korea, (1995), 510-516.