Shearing stress on the surface topography by scanning shearing stress microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 849-851

  Iwata, Futoshi ^a   Sasaki, Akira ^a   Kawaguchi, Makoto ^a   Katsumata, Akira ^a   Aoyama, Hisayuki ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344937022     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588728     Document Type: Article

References (11)

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