Opportunities and challenges for laser technology in microelectronics and photonics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4977, Issue , 2003, Pages 448-457

  Hoving, Willem ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Adjustment; Cleavage; Laser mass transfer; Laser materials processing; Micro spot welding; Process control; Separation; Spike welding

Indexed keywords

IRRADIATION; LASER ABLATION; LASER BEAM CUTTING; LASER BEAM WELDING; LASER PULSES; MASS TRANSFER; MICROELECTRONICS; MICROMACHINING; OPTICAL DEVICES; PROCESS CONTROL;

ADJUSTMENT; CLEAVAGE; LASER MASS TRANSFER; LASER MATERIALS PROCESSING; LASER TECHNOLOGY; MICRO-SPOT WELDING; PHOTONICS; SPIKE WELDING;

LASER APPLICATIONS;

EID: 0344861950     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478607     Document Type: Conference Paper

References (6)

1. D.K. Dijken, W. Hoving and J.Th.M. de Hosson, "Laser penetration spike welding - A welding tool enabling novel process and design opportunities", Photon Processing in Microelectronics and Photons Conference, San Jose, January 2002 in Proceedings of SPIE Vol. 4637 (2002), pp. 555 - 560. Laser spike-welding is a patent pending technology.
2. D.K. Dijken, W. Hoving and J.Th.M. de Hosson, Journal of Laser Applications, Vol. 15, No 1 (2003).
3. A.H.M. Blom, P. Dunias, P.G. van Engen, W. Hoving, J. de Kramer, "Process spread reduction of laser micro spot welding of thin copper parts using real-time control", this conference.
4. W. Hoving, "Accurate Manipulation using Laser Technology" in Laser Assisted Net Shape Engineering 3, Proceedings of the LANE 2001, edited by M. Geiger & A. Otto, Miesenbach-Verlag Bamberg 2001, pp. 113-124 (2001).
5. E.C.M. Verhoeven, H.F.P. de Bie and W. Hoving, "Laser adjustment of reed switches: micron accuracy in mass production", Proceedings of the LEF'99 Conference ("Laser in der Elektronikproduktion & Feinwerktechnik", Erlangen, March 1999, Miesenbach Bamberg, pp. 169-179 (1999).
6. E. Elizur, D. Gelbart, "Thermal lithography for flat panel display manufacturing", Proceedings of the SID'02 meeting, SID 02 Digest, pp. 1055 - 1057.