Measurement of roughness at buried Si interfaces by transmission electron diffraction

Physical Review B - Condensed Matter and Materials Physics

Volumn 54, Issue 4, 1996, Pages 2846-2855

  Chen, Xidong ^a   Gibson, J Murray ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344836865     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.54.2846     Document Type: Article

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