Structure and phase analysis of fine powder materials produced by target sputtering with power pulsed beam

Fizika i Khimiya Obrabotki Materialov

Volumn , Issue 3, 2001, Pages 62-67

  Ivanov, Yu F ^a   Remnev, G E ^a   Makeev, V A ^a  

^a NATIONAL RESEARCH TOMSK POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; MORPHOLOGY; PHASE COMPOSITION; SIZE DETERMINATION; SPUTTERING; TARGETS;

ION SPUTTERING;

POWDER METALS;

EID: 0344703575     PISSN: 00153214     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)