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Volumn 42, Issue 34, 2003, Pages 6877-6879

Development in situ for gratings recorded in photoresist

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE DIFFRACTION; HIGH TEMPERATURE EFFECTS; HOLOGRAPHIC INTERFEROMETRY; LIGHT INTERFERENCE; MOIRE FRINGES; OPTICAL SYSTEMS;

EID: 0344686363     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.006877     Document Type: Article
Times cited : (3)

References (11)
  • 1
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    • (1984) Holographic Interferometry , pp. 207-210
    • Hariharan, P.1
  • 2
    • 0014507738 scopus 로고
    • Mirror blank testing by realtime holographic interferometry
    • W. van Deelen and P. Nisenson, “Mirror blank testing by realtime holographic interferometry,” Appl. Opt. 8, 951-955 (1969).
    • (1969) Appl. Opt. , vol.8 , pp. 951-955
    • Van Deelen, W.1    Nisenson, P.2
  • 3
    • 0001521052 scopus 로고
    • Rapid in Situ processing for real-time holographic interferometry
    • P. Hariharan and B. S. Ramprasad, “Rapid in Situ processing for real-time holographic interferometry,” J. Phys. E. 6, 699-701 (1973).
    • (1973) J. Phys. E. , vol.6 , pp. 699-701
    • Hariharan, P.1    Ramprasad, B.S.2
  • 4
    • 0003713904 scopus 로고
    • High sensitivity moire
    • (Springer-Verlag, New York,), Chap. 4
    • D. Post, B. Han, and P. Ifju, “High sensitivity moire,” in Moire Interferometry (Springer-Verlag, New York, 1994), Chap. 4, pp. 135-226.
    • (1994) Moire Interferometry , pp. 135-226
    • Post, D.1    Han, B.2    Ifju, P.3
  • 5
    • 0010268391 scopus 로고
    • In situ end-point detection during development of submicrometer grating structures in photoresist
    • J. A. Britten, R. D. Boyd, and B. W. Shore, “In situ end-point detection during development of submicrometer grating structures in photoresist,” Opt. Eng. 34, 474 - 479 (1995).
    • (1995) Opt. Eng. , vol.34
    • Britten, J.A.1    Boyd, R.D.2    Shore, B.W.3
  • 6
    • 0037263663 scopus 로고    scopus 로고
    • Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography
    • C. Perez Lopez, F. Mendoza Santoyo, and J. A. Guerrero, “Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography,” Meas. Sci. Technol. 14, 97-100 (2003).
    • (2003) Meas. Sci. Technol. , vol.14 , pp. 97-100
    • Perez Lopez, C.1    Mendoza Santoyo, F.2    Guerrero, J.A.3
  • 7
    • 0037401742 scopus 로고    scopus 로고
    • Fracture detection by grating moire and in-plane ESPI techniques
    • A. Martinez, R. Rodriguez-Vera, J. A. Rayas, and H. J. Puga, “Fracture detection by grating moire and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525-536 (2003).
    • (2003) Opt. Lasers Eng. , vol.39 , pp. 525-536
    • Martinez, A.1    Rodriguez-Vera, R.2    Rayas, J.A.3    Puga, H.J.4
  • 8
    • 0006420382 scopus 로고
    • Holographic recording material
    • H. M. Smith ed. (Springer-Verlag, New York,), Chap. 7
    • R. A. Bartolini, “Holographic recording material,” in Photoresist, H. M. Smith ed. (Springer-Verlag, New York, 1977), Chap. 7, pp. 217-221.
    • (1977) Photoresist , pp. 217-221
    • Bartolini, R.A.1
  • 9
    • 0016071871 scopus 로고
    • Characteristics of a photoresist hologram and its replica
    • F. Iwata and J. Tsujiuchi, “Characteristics of a photoresist hologram and its replica,” Appl. Opt. 13, 1327-1336 (1974).
    • (1974) Appl. Opt. , vol.13 , pp. 1327-1336
    • Iwata, F.1    Tsujiuchi, J.2
  • 11
    • 0038682815 scopus 로고    scopus 로고
    • Theoretical analysis and digital photoelastic measurement of circular disks subjected to partially distributed compressions
    • K. M. Hung and C. C. Ma, “Theoretical analysis and digital photoelastic measurement of circular disks subjected to partially distributed compressions,” Exp. Mech. 43, 216-224 (2003).
    • (2003) Exp. Mech. , vol.43 , pp. 216-224
    • Hung, K.M.1    Ma, C.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.