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Volumn 52, Issue 11, 2003, Pages 2865-
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Investigation on the oxygen contamination in the μc-Si:H thin film deposited by VHF-PECVD
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0344630273
PISSN: 10003290
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (7)
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References (0)
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