Resistless patterning for selective growth

Applied Physics Letters

Volumn 71, Issue 20, 1997, Pages 2987-2989

  Shiralagi, Kumar ^a   Tsui, Raymond ^a   Goronkin, Herbert ^a  

^a Phoenix Corporation Research Laboratories   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344609410     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120238     Document Type: Article

References (7)

1. W. T. Tsang, J. Cryst. Growth 120, 1 (1992).
2. H. Heinecke, J. Cryst. Growth 136, 18 (1994).
3. J. Shen, S. Tehrani, H. Goronkin, and G. Kramer, Proc. SPIE 2694, 90 (1996).
4. K. Shiralagi, M. Walther, R. Tsui, and H. Goronkin, J. Cryst. Growth 164, 334 (1996).
5. K. Shiralagi and R. Tsui, Shiralagi Resistless Patterning (SRP), Motorola Internal Report, 1996 (unpublished).
6. C. W. Wilmsen, Physics and Chemistry of III-V Compound Semiconductor Interfaces (Plenum, New York, 1985).
7. A. J. SpringThorpe, S. J. Ingrey, B. Emmerstorfer, P. Mandeville, and W. T. Moore, Appl. Phys. Lett. 50, 77 (1987).