Spherical aberration corrector using space charge

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2732-2736

  Chao, L C ^a   Orloff, J ^a   Wang, Li ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b SCHLUMBERGER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344575302     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589717     Document Type: Article

References (25)

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