Excimer and femtosecond pulsed laser induced forward transfer process of metal thin film

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4977, Issue , 2003, Pages 426-433

  Yamada, Hirokazu ^a   Sano, Tomokazu ^a   Ohmura, Etsuji ^a   Miyamoto, Isamu ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Direct writing; Laser induced forward transfer (LIFT); Thin film patterning

Indexed keywords

ADHESION; EXCIMER LASERS; FUSED SILICA; LASER APPLICATIONS; NICKEL; SILICON; SUBSTRATES; THIN FILMS;

DIRECT WRITING; FEMTOSECOND PULSED LASER; LASER INDUCED FORWARD TRANSFER; METAL THIN FILM; THIN FILM PATTERNING;

LASER PULSES;

EID: 0344551197     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479249     Document Type: Conference Paper

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