Acoustic and electromechanical properties of 1-3 PZT composites for ultrasonic transducer arrays fabricated by sacrificial micro PMMA mold

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 206-211

  Park, Joon Shik ^a,c   Lee, Sun Ho ^b   Park, Soon Sup ^a   Cho, Jin Woo ^a   Jung, Suk Won ^a   Han, Jin Ho ^b   Kang, Sung Goon ^c  

^a Korea Electronic Technology Institute (KETI)   (South Korea)

^b Prosonic Co Ltd   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

1 3 Composite; Injection molding; Micro pressing; PMMA; Transducer array

Indexed keywords

ARRAYS; BANDWIDTH; COATINGS; COMPOSITE MATERIALS; INJECTION MOLDING; MICROSTRUCTURE; PERMITTIVITY; POLISHING;

DICING METHOD; MICRO-PRESSING METHOD;

ULTRASONIC TRANSDUCERS;

EID: 0344514615     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00362-5     Document Type: Conference Paper

References (7)

1. Y. Hirata, H. Nakaishi, T. Numazawa, H. Takada, in: Proceedings of the 1997 IEEE Ultrasonics Symposium on Piezocomposite of Fine PZT Rods Realized with Synchrotron Radiation Lithography, 1997, pp. 877-881.
2. T. Ritter, K.K. Shung, P.D. Lopath, S.E. Park, T.R. Shrout, Single crystal PZN/PT-polymer composites for ultrasound transducer applications, IEEE Trans. Ultrasonics, Ferroelectr. Freq. Control 47 (4) (2000) 792-800.
3. T.R. Guruaja, W.A. Schulze, L.E. Cross, R.E. Newnham, B.A. Auld, Y.J. Wang, Piezoelectric composite materials for ultrasonic transducer applications. Part I. Resonant modes of vibration of PZT rod polymer composites, IEEE Trans. Sonic Ultrasonics SU-32 (1985) 481-497.
4. V.F. Janas, A. Safari, Overview of fine-scale piezoelectric ceramic/polymer composite processing, J. Am. Ceram. Soc. 78 (11) (1995) 2445-2455.
5. K. Lubitz, A. Wolff, G. Preu, New piezoelectric composites for ultrasonic transducers, Ferroelectrics 133 (1993) 21-26.
6. S.N. Wang, J.F. Li, R. Toda, R. Watanabe, K. Minami, M. Esashi, in: 1998 IEEE MEMS Proceedings on Novel Processing of High Aspect Ration 1-3 Structures of High Density PZT, 1998, pp. 223-229.
7. J.S. Park, J.W. Cho, S.W. Jung, S.S. Park, S.H. Lee, D.H. Kim, J.H. Han, Properties of 1-3 PZT Composite for Ultrasonic Transducer Array Fabricated by Micro-pressing and Dicing Methods, in: Proceedings of the Transducers 2001, No. 3B2.09P, 2001, pp. 1026-1029.