Laser-induced heterogeneous processes at deposition of elements from vapors of transition-metal carbonyls

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5121, Issue , 2002, Pages 280-287

  Mulenko, Sergay A ^a  

^a INSTITUTE OF METAL PHYSICS   (Ukraine)

Author keywords

Deposition; Film; Laser; Vapor

Indexed keywords

ARGON; CHEMICAL VAPOR DEPOSITION; IRON COMPOUNDS; IRRADIATION; MOLYBDENUM COMPOUNDS; RATE CONSTANTS; SILICA; SUBSTRATES; VAPOR PRESSURE;

LASER CHEMICAL VAPOR DEPOSITION (LCVD);

LASER BEAM EFFECTS;

EID: 0344514006     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.515614     Document Type: Conference Paper

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