Pb(Zr,Ti)O3 ceramic thick films for optical device applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5122, Issue , 2002, Pages 371-376

  Cardin, J ^a   Leduc, D ^a   Boisrobert, C ^a   Gundel, H W ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

Glass substrate; M lines; Optical waveguide; PZT; Thick films; Transparency; Wet chemical etching

Indexed keywords

ANNEALING; CERAMIC MATERIALS; CRYSTALLIZATION; ETCHING; GLASS; OPTICAL DEVICES; OPTICAL WAVEGUIDES; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING LEAD COMPOUNDS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

WET CHEMICAL ETCHING;

THICK FILMS;

EID: 0344513322     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.515798     Document Type: Conference Paper

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