High performances micro-machined millimeter-wave structures

1998 28th European Microwave Conference, EuMC 1998

Volumn 1, Issue , 1998, Pages 690-694

  Guillon, B ^a   Saint Etienne, E ^a   Pons, P ^a   Blasquez, G ^a   Parra, T ^a   Lalaurie, J C ^b   Cros, D ^c   Graffeuil, J ^a   Plana, R ^a  

^a LAAS CNRS   (France)

^b CNES   (France)

^c Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; DIELECTRIC DEVICES;

DESIGN IMPROVEMENTS; ELECTROMAGNETIC SIMULATION; HIGH QUALITY FACTORS; INPUT/OUTPUT; MEMBRANE AREA; MICRO-MACHINED; SILICON ANISOTROPIC ETCHING; SILICON SUBSTRATES;

INSERTION LOSSES;

EID: 0344494333     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMA.1998.338070     Document Type: Conference Paper

References (9)

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