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Volumn 2, Issue , 2003, Pages 674-675
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Reliability improvement of hybrid organic-inorganic waveguides by dielectric passivation
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC PROPERTIES;
ELECTRON BEAMS;
INTEGRATED OPTICS;
LIGHT PROPAGATION;
LOW TEMPERATURE OPERATIONS;
OPTICAL FILMS;
PASSIVATION;
RELIABILITY;
SILICA;
SILICON WAFERS;
SOL-GELS;
SPIN COATING;
DIELECTRIC PASSIVATION;
ELECTRON BEAM EVAPORATOR;
INORGANIC-ORGANIC SOL-GEL;
ORGANIC-INORGANIC WAVEGUIDE;
PHOTOPATTERNABILITY;
SOL-GEL WAVEGUIDE FILM;
TWO-STEP ACID ASSISTED METHOD;
DIELECTRIC WAVEGUIDES;
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EID: 0344465831
PISSN: 10928081
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (6)
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References (3)
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