Tribological properties and hardness of silicon nitride ceramics after ion implantation and subsequent annealing

Surface and Coatings Technology

Volumn 110, Issue 3, 1998, Pages 188-193

  Brenscheidt, F ^a   Matz, W ^a   Wieser, E ^a   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Annealing; Ion implantation; Silicon nitride ceramics

Indexed keywords

ALUMINA; AMORPHIZATION; ANNEALING; CRYSTALLIZATION; HARDNESS; ION IMPLANTATION; OXIDATION; PHASE COMPOSITION; SILICON NITRIDE; TRIBOLOGY; YTTRIUM COMPOUNDS;

YTTRIA;

CERAMIC COATINGS;

CERAMICS; ION IMPLANTATION; SILICON NITRIDE; TRIBOLOGY;

EID: 0344457291     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00699-9     Document Type: Article

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