Study of the chemistry of NH3 on aluminum nitride and oxynitride under steady-state conditions using external-reflection infrared spectroscopy

Thin Solid Films

Volumn 347, Issue 1-2, 1999, Pages 195-200

  Bermudez, V M ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDITY; ALUMINUM COMPOUNDS; AMMONIA; ANNEALING; CHEMISORPTION; CHEMISTRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NICKEL COMPOUNDS; SURFACES;

ALUMINUM NITRIDE; ALUMINUM OXIDE; LEWIS ACIDITY; OXYNITRIDE; STEADY STATE CONDITIONS;

THIN FILMS;

EID: 0344339158     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00003-6     Document Type: Article

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