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Applied Physics Letters

Volumn 69, Issue 13, 1996, Pages 1873-1875

Rapid solid phase crystallization of nanocrystalline silicon deposited by electron cyclotron plasma chemical vapor deposition

(5) Holgado, S a Martinez J a Garrido, J a Morant, C a Piqueras, J a

a UNIVERSIDAD AUTÓNOMA DE MADRID (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344285146 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.117462 Document Type: Article

Times cited : (6)

References (17)

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