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Volumn 43, Issue 4, 2000, Pages 629-637

Trapping of impurity molecules in condensation from mixtures of gases

Author keywords

Deposition; Impurity; Mixture of gases; Trapping

Indexed keywords

DEPOSITION; GASES; IMPURITIES; MIXTURES; MOLECULES; THERMODYNAMICS;

EID: 0344182464     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0017-9310(99)00169-6     Document Type: Article
Times cited : (11)

References (29)
  • 1
    • 0004104767 scopus 로고
    • C.F. Powell, J.H. Oxley, J.M. Blocher Jr. (Eds.), Wiley, New York, London, Sydney
    • C.F. Powell, J.H. Oxley, J.M. Blocher Jr. (Eds.), Vapor Deposition, Wiley, New York, London, Sydney, 1968.
    • (1968) Vapor Deposition
  • 3
    • 0022896044 scopus 로고
    • Production of ultrafine metal oxide aerosol particles by thermal decomposition of metal alkoxide vapors
    • K. Okuyama, Y. Kousaka, N. Tohge, S. Yamamoto, J.J. Wu, R.C. Flagan, J.H. Seinfeld, Production of ultrafine metal oxide aerosol particles by thermal decomposition of metal alkoxide vapors, AIChE Journal 32 (1986) 2010-2019.
    • (1986) AIChE Journal , vol.32 , pp. 2010-2019
    • Okuyama, K.1    Kousaka, Y.2    Tohge, N.3    Yamamoto, S.4    Wu, J.J.5    Flagan, R.C.6    Seinfeld, J.H.7
  • 4
    • 0029274219 scopus 로고
    • Gas phase synthesis of fine silica particles by oxidation of tetraethylorthosilicate vapour
    • J. Smolik, P. Moravec, Gas phase synthesis of fine silica particles by oxidation of tetraethylorthosilicate vapour, J. Materials Science Letters 14 (1995) 387-389.
    • (1995) J. Materials Science Letters , vol.14 , pp. 387-389
    • Smolik, J.1    Moravec, P.2
  • 5
    • 0030233502 scopus 로고    scopus 로고
    • Preparation of particles by CO2 laser assisted decomposition of tetraethylorthosilicate vapour
    • P. Moravec, J. Smolik, V. Drinek, V.V. Levdansky, Preparation of particles by CO2 laser assisted decomposition of tetraethylorthosilicate vapour, J. Aerosol Sei 27 (Suppl. 1) (1996) 157-158.
    • (1996) J. Aerosol Sei , vol.27 , Issue.1 SUPPL. , pp. 157-158
    • Moravec, P.1    Smolik, J.2    Drinek, V.3    Levdansky, V.V.4
  • 7
    • 0004182434 scopus 로고
    • B.K. Vainshtein, et al. (Eds.), Izd. Nauka, Moscow
    • B.K. Vainshtein, et al. (Eds.), Modern Crystallography, vol. 3, Izd. Nauka, Moscow, 1980.
    • (1980) Modern Crystallography , vol.3
  • 8
    • 33847530374 scopus 로고    scopus 로고
    • Certain regularities in the condensation of mixtures of gases, in: Heat and Mass Transfer: Processes and Apparata
    • V.V. Levdansky, Certain regularities in the condensation of mixtures of gases, in: Heat and Mass Transfer: Processes and Apparata, Sbornik Nauch. Trudov ITMO AN BSSR, Minsk, 1978, pp. 27-28.
    • Sbornik Nauch. Trudov ITMO AN BSSR, Minsk , vol.1978 , pp. 27-28
    • Levdansky, V.V.1
  • 9
    • 0013569496 scopus 로고
    • Kinetics of the precipitation of a substance from a gas mixture
    • V.V. Levdansky, Kinetics of the precipitation of a substance from a gas mixture, J. Engng. Phys 37 (1979) 1145-1150.
    • (1979) J. Engng. Phys , vol.37 , pp. 1145-1150
    • Levdansky, V.V.1
  • 12
    • 33646076498 scopus 로고
    • On the question of condensation of a substance from a gas mixture
    • V.V. Levdansky, O.G. Martynenko, On the question of condensation of a substance from a gas mixture, Vestsi AN BSSR, Ser. Fiz.-Energ 4 (1986) 87-90.
    • (1986) Vestsi AN BSSR, Ser. Fiz.-Energ , vol.4 , pp. 87-90
    • Levdansky, V.V.1    Martynenko, O.G.2
  • 13
    • 0005342813 scopus 로고    scopus 로고
    • Processes of transfer in aerodisperse systems subjected to the effect of resonance radiation
    • Sbornik Nauch. Trudov ITMO AN BSSR, Minsk
    • V.V. Levdansky, Processes of transfer in aerodisperse systems subjected to the effect of resonance radiation, in: Heat and Mass Transfer Under the Influence of Radiative Fluxes on Materials, Sbornik Nauch. Trudov ITMO AN BSSR, Minsk, 1990, pp. 40-52.
    • Heat and Mass Transfer under the Influence of Radiative Fluxes on Materials , vol.1990 , pp. 40-52
    • Levdansky, V.V.1
  • 14
    • 33646087010 scopus 로고
    • Concentration of components in condensate forming in a quasi-closed volume with deposition from a gas phase
    • J. Vitovec, V.V. Levdansky, J. Smolik, Concentration of components in condensate forming in a quasi-closed volume with deposition from a gas phase, Vestsi AN BSSR, Ser. Fiz.-Energ 2 (1989) 102-105.
    • (1989) Vestsi AN BSSR, Ser. Fiz.-Energ , vol.2 , pp. 102-105
    • Vitovec, J.1    Levdansky, V.V.2    Smolik, J.3
  • 15
    • 0042912879 scopus 로고
    • Distribution of impurities in layers of substances deposited from the gas phase
    • V.V. Levdansky, Distribution of impurities in layers of substances deposited from the gas phase, High-Purity Substances 3 (1989) 433-437.
    • (1989) High-Purity Substances , vol.3 , pp. 433-437
    • Levdansky, V.V.1
  • 16
    • 0021394265 scopus 로고
    • Effect of resonance radiation on mass transfer in heterogeneous media, Heat Transfer
    • V.V. Levdansky, O.G. Martynenko, Effect of resonance radiation on mass transfer in heterogeneous media, Heat Transfer, Soviet Research 19 (1987) 34-56.
    • (1987) Soviet Research , vol.19 , pp. 34-56
    • Levdansky, V.V.1    Martynenko, O.G.2
  • 18
    • 33646078151 scopus 로고    scopus 로고
    • Trapping of impurity molecules by growing aerosol particles in laser deposition from a gas phase
    • V.V. Levdansky, P. Moravec, J. Smolik, Trapping of impurity molecules by growing aerosol particles in laser deposition from a gas phase, Vestsi AN BSSR, Ser. Fiz.-Energ4 (1996) 119-123.
    • (1996) Vestsi AN BSSR, Ser. Fiz.-Energ , vol.4 , pp. 119-123
    • Levdansky, V.V.1    Moravec, P.2    Smolik, J.3
  • 19
    • 0000911878 scopus 로고
    • An analytical expression for the rate of binary condensation particle growth
    • M. Kulmala, T. Vesala, P.E. Wagner, An analytical expression for the rate of binary condensation particle growth, Proc. R. Soc. Lond A 441 (1993) 589-605.
    • (1993) Proc. R. Soc. Lond a , vol.441 , pp. 589-605
    • Kulmala, M.1    Vesala, T.2    Wagner, P.E.3
  • 20
    • 0031172058 scopus 로고    scopus 로고
    • On the condensational growth of a multicomponent droplet
    • T. Mattila, M. Kulmala, T. Vesala, On the condensational growth of a multicomponent droplet, J. Aerosol Sei 28 (1997) 553-564.
    • (1997) J. Aerosol Sei , vol.28 , pp. 553-564
    • Mattila, T.1    Kulmala, M.2    Vesala, T.3
  • 21
    • 0345497016 scopus 로고
    • Laser control of diffusion of gas through porous membranes
    • N.V. Karlov, B.S. Lukiyanchuk, Laser control of diffusion of gas through porous membranes, Kvantovaya Elektronika 8 (1981) 1509-1514.
    • (1981) Kvantovaya Elektronika , vol.8 , pp. 1509-1514
    • Karlov, N.V.1    Lukiyanchuk, B.S.2
  • 22
    • 0343711347 scopus 로고
    • Impurity incorporation in vapor phase epitaxy: S in GaAs
    • H. Sandoval, J. Mimila-Arroyo, J.C. Bourgoin, Impurity incorporation in vapor phase epitaxy: S in GaAs, J. Appl. Phys 77 (1995) 5418-5421.
    • (1995) J. Appl. Phys , vol.77 , pp. 5418-5421
    • Sandoval, H.1    Mimila-Arroyo, J.2    Bourgoin, J.C.3
  • 23
    • 0003696779 scopus 로고
    • G. Haas (Ed.), Academic Press, New York
    • G. Haas (Ed.), Physics of Thin Films, vol. 1, Academic Press, New York, 1966.
    • (1966) Physics of Thin Films , vol.1
  • 24
    • 33847496145 scopus 로고    scopus 로고
    • Mirrors for ultraviolet and infrared regions of spectrum
    • S.I. Sagitov, Mirrors for ultraviolet and infrared regions of spectrum, in: Trudy FIAN, Izd. Nauka, Moscow, 1982, pp. 118-164.
    • Trudy FIAN, Izd. Nauka, Moscow , vol.1982 , pp. 118-164
    • Sagitov, S.I.1
  • 25
    • 0001306082 scopus 로고    scopus 로고
    • Surface chemistry in the chemical vapor deposition of electronic materials
    • S.M. Gates, Surface chemistry in the chemical vapor deposition of electronic materials, Chem. Rev 96 (1996) 1519-1532.
    • (1996) Chem. Rev , vol.96 , pp. 1519-1532
    • Gates, S.M.1
  • 26
    • 0008248794 scopus 로고
    • Control of a substance deposition onto the inner surface of a cylindrical channel
    • V.V. Levdansky, Control of a substance deposition onto the inner surface of a cylindrical channel, J. Engng. Phys 43 (1982) 1090-1093.
    • (1982) J. Engng. Phys , vol.43 , pp. 1090-1093
    • Levdansky, V.V.1
  • 27
    • 33847524224 scopus 로고
    • Calculation of the interaction of molecular fluxes with surrounding vessels
    • Yu.N. Lyubitov, Calculation of the interaction of molecular fluxes with surrounding vessels. Izd. Nauka, Moscow, 1964.
    • (1964) Izd. Nauka, Moscow
    • Lyubitov, Y.N.1
  • 28
    • 0000948925 scopus 로고
    • The flow of highly rarefied gases through tubes of arbitrary length
    • P. Clausing, The flow of highly rarefied gases through tubes of arbitrary length, J. Vacuum Sci. and Tech 8 (1971) 636-648.
    • (1971) J. Vacuum Sci. and Tech , vol.8 , pp. 636-648
    • Clausing, P.1
  • 29
    • 0039525535 scopus 로고    scopus 로고
    • Trapping of impurity molecules by growing aerosol particles
    • V.V. Levdansky, Trapping of impurity molecules by growing aerosol particles, J. Aerosol Sei 29 (Suppl. 1) (1998) 385-386.
    • (1998) J. Aerosol Sei , vol.29 , Issue.1 SUPPL. , pp. 385-386
    • Levdansky, V.V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.