Interface states in nitrogen incorporated gate oxides

Applied Physics Letters

Volumn 68, Issue 14, 1996, Pages 1978-1980

  Hirabayashi, Kanji ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344181655     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115645     Document Type: Article

References (22)

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