-
1
-
-
0242278253
-
Über einige Fehler von Elektronenlinsen
-
O. Scherzer: Über einige Fehler von Elektronenlinsen. Z. Phys. 101 (1936) 593-603.
-
(1936)
Z. Phys.
, vol.101
, pp. 593-603
-
-
Scherzer, O.1
-
2
-
-
0011542835
-
Der Öffnungsfehler von rotationssymmetrischen Elektronenlinsen mit Raumladung
-
D. Typke: Der Öffnungsfehler von rotationssymmetrischen Elektronenlinsen mit Raumladung. Optik 28 (1968) 488-494.
-
(1968)
Optik
, vol.28
, pp. 488-494
-
-
Typke, D.1
-
3
-
-
4243102504
-
Experimental Investigation on Electron Interactions
-
London
-
E. A. Ash, D. Gabor: Experimental Investigation on Electron Interactions. Proc. Royal Soc. (London) A 228 (1955) 477-490.
-
(1955)
Proc. Royal Soc.
, vol.228 A
, pp. 477-490
-
-
Ash, E.A.1
Gabor, D.2
-
4
-
-
0345006353
-
Korrektur des Öffnungsfehlers bei elektrostatischen Linsen durch Raumladung
-
G. Haufe: Korrektur des Öffnungsfehlers bei elektrostatischen Linsen durch Raumladung. Optik 15 (1958) 521-537.
-
(1958)
Optik
, vol.15
, pp. 521-537
-
-
Haufe, G.1
-
5
-
-
77957710080
-
Space Charge Correction of Spherical Aberration
-
Manchester The Institute of Physics, London
-
J. B. LePoole: Space Charge Correction of Spherical Aberration. Proc. Fifth Congress on Electron Microscopy, Manchester (1972) 130-131, The Institute of Physics, London.
-
(1972)
Proc. Fifth Congress on Electron Microscopy
, pp. 130-131
-
-
Lepoole, J.B.1
-
6
-
-
0022097687
-
Spherical and Chromatic Aberration of a Homogeneous Spherical Space Charge Lens
-
R. Meinel, D. Jansen: Spherical and Chromatic Aberration of a Homogeneous Spherical Space Charge Lens. Optik 70 (1985) 178-180.
-
(1985)
Optik
, vol.70
, pp. 178-180
-
-
Meinel, R.1
Jansen, D.2
-
7
-
-
4243155798
-
A New Method for calculating the Axial Potential Due to Space Charge in Electrostatic Optics
-
L. Wang, J. Orloff, D. Book, T. Tang: A New Method for calculating the Axial Potential Due to Space Charge in Electrostatic Optics. J. Phys. D 28 (1995) 1791-1801.
-
(1995)
J. Phys. D
, vol.28
, pp. 1791-1801
-
-
Wang, L.1
Orloff, J.2
Book, D.3
Tang, T.4
-
8
-
-
4243098947
-
Study of Space Charge Devices for Focused Ion Beam Systems
-
L. Wang, J. Orloff, T. Tang: Study of Space Charge Devices for Focused Ion Beam Systems. J. Vac. Sci. Tech. B 13 (1995) 2414-2418.
-
(1995)
J. Vac. Sci. Tech.
, vol.13 B
, pp. 2414-2418
-
-
Wang, L.1
Orloff, J.2
Tang, T.3
-
9
-
-
4243101222
-
Modeling and Design of Space Charge Lenses/Correctors for Focused Ion Beam Systems
-
To be pub.
-
T. Tang, J. Orloff, L. Wang: Modeling and Design of Space Charge Lenses/Correctors for Focused Ion Beam Systems. To be pub. in J. Vac. Sci. Tech.
-
J. Vac. Sci. Tech.
-
-
Tang, T.1
Orloff, J.2
Wang, L.3
-
10
-
-
0001489744
-
Experimentelle Bestimmung der Energieverteilung in thermisch ausgelösten Elektronenstrahlen
-
H. Boersch: Experimentelle Bestimmung der Energieverteilung in thermisch ausgelösten Elektronenstrahlen. Z. Phys. 139 (1954) 115-122.
-
(1954)
Z. Phys.
, vol.139
, pp. 115-122
-
-
Boersch, H.1
-
11
-
-
0018545656
-
Analysis of Energy Broadening in Electron and Ion Beams
-
W. Knauer: Analysis of Energy Broadening in Electron and Ion Beams. Optik 54 (1979) 211-234.
-
(1979)
Optik
, vol.54
, pp. 211-234
-
-
Knauer, W.1
-
12
-
-
0006967170
-
Broadened Energy Distributions in Electron Beams
-
B. Zimmermann: Broadened Energy Distributions in Electron Beams. Adv. Electr. and Elect. Phys. 29 (1970) 257-312.
-
(1970)
Adv. Electr. and Elect. Phys.
, vol.29
, pp. 257-312
-
-
Zimmermann, B.1
-
13
-
-
0019280107
-
On the theory of the Boersch Effect
-
H. Rose, R. Spehr: On the theory of the Boersch Effect. Optik 57(1980) 339-364.
-
(1980)
Optik
, vol.57
, pp. 339-364
-
-
Rose, H.1
Spehr, R.2
-
14
-
-
0020833124
-
Statistical Limitations in Electron Beam Lithography
-
M. J. van Leeuwen, G. H. Jansen: Statistical Limitations in Electron Beam Lithography. Optik 65 (1983) 179-208.
-
(1983)
Optik
, vol.65
, pp. 179-208
-
-
Van Leeuwen, M.J.1
Jansen, G.H.2
-
15
-
-
0023327467
-
Statistical Dynamics Theory of the Space Charge Effects in a Charged Particle Beam
-
T. Tang: Statistical Dynamics Theory of the Space Charge Effects in a Charged Particle Beam. Optik 76 (1986) 38-43.
-
(1986)
Optik
, vol.76
, pp. 38-43
-
-
Tang, T.1
-
16
-
-
0018541857
-
Electron Beam Broadening Effects Caused by Discreteness of Space Charge
-
T. Groves, D. L. Hammond, H. Kuo: Electron Beam Broadening Effects Caused by Discreteness of Space Charge. J. Vac. Sci. Tech. 16 (1979) 1680-1685.
-
(1979)
J. Vac. Sci. Tech.
, vol.16
, pp. 1680-1685
-
-
Groves, T.1
Hammond, D.L.2
Kuo, H.3
-
17
-
-
0019633440
-
Monte Carlo Modeling of Current Distribution in Shaped Electron Beams
-
P. S. Dyan, G. A. C. Jones: Monte Carlo Modeling of Current Distribution in Shaped Electron Beams. J. Vac. Sci. Tech. 19 (1981) 1094-1097.
-
(1981)
J. Vac. Sci. Tech.
, vol.19
, pp. 1094-1097
-
-
Dyan, P.S.1
Jones, G.A.C.2
-
18
-
-
0020763590
-
Monte Carlo Simulation of Discrete Space Charge Effects in Electron Beam Lithography Systems
-
T. Tang: Monte Carlo Simulation of Discrete Space Charge Effects in Electron Beam Lithography Systems. Optik 64 (1983) 237-250.
-
(1983)
Optik
, vol.64
, pp. 237-250
-
-
Tang, T.1
-
20
-
-
4243110112
-
Numerical Experiments on the N-Body Problem
-
Reidel Publishing Company, Dordrecht, The Netherlands
-
S. J. Aarseth: Numerical Experiments on the N-Body Problem. Proc. IAU Colloquium No. 10, 29-43, Reidel Publishing Company, Dordrecht, The Netherlands 1972.
-
(1972)
Proc. IAU Colloquium No. 10
, pp. 29-43
-
-
Aarseth, S.J.1
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