Coaxial evaporation source using vacuum arc discharge

Shinku/Journal of the Vacuum Society of Japan

Volumn 40, Issue 3, 1997, Pages 300-302

  Chayahara, Akiyoshi ^a   Mokuno, Yoshiaki ^a   Tsubouchi, Nobuteru ^a   Horino, Yuji ^a   Kinomura, Atsushi ^a   Fujii, Kanenaga ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344124264     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.40.300     Document Type: Article

References (2)

1. J. Vyskocil and J. Musil: J. Vac. Sci. Technol. A10 (1990) 1740.