An instrument to control parallel plate separation for nanoscale flow control

Review of Scientific Instruments

Volumn 74, Issue 11, 2003, Pages 4869-4875

  White, J ^a   Ma, H ^b   Lang, J ^c   Slocum, A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROFLUIDIC SYSTEMS;

ETCHING; FLOW OF WATER; FLUIDIC DEVICES; GAS CHROMATOGRAPHY; METHANOL; MICROACTUATORS; NANOSTRUCTURED MATERIALS; NAVIER STOKES EQUATIONS; PRESSURE EFFECTS; SURFACE ROUGHNESS; THERMAL EFFECTS; VISCOUS FLOW;

FLOW CONTROL;

EID: 0344083654     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1621066     Document Type: Article

References (11)

1. A. L. Demirel and S. Granick, J. Chem. Phys. 115, 1498 (2001).
2. D. Y. C. Chen and R. G. Horn, J. Chem. Phys. 83, 5311 (1985).
3. Y. Zhu and S. Granick, Phys. Rev. Lett. 87, 096105 (2001).
4. Y. Zhu and S. Granick, Phys. Rev. Lett. 88, 106102 (2002).
5. A. Slocum, Precision Machine Design, SME, Dearborn, MI, 1992.
6. U.S. Patent No. 5,964,242 (12 Oct., 1999).
7. S. Timoshenko, Theory of Plates and Shells (McGraw-Hill, New York, 1940).
8. R. J. Roark, Formulas for Stress and Strain (McGraw-Hill, New York, 1943).
9. J. K. Bhardwaj and H. Ashraf, Proc. SPIE 2639, 224 (1995).
10. L. B. Loeb, The Kinetic Theory of Gases (Dover, New York, 1961).
11. J. White, The Nanogate: Nanoscale Flow Control (MIT Press, Cambridge, MA, 2003).