Spatial light modulators based on micromachined reflective membranes on viscoelastic layers

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 271-275

  Sakarya, S ^a   Vdovin, G ^a   Sarro, P M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

MEMS; Projection displays; Spatial light modulator; Viscoelastic layers

Indexed keywords

ALUMINUM; DEFORMATION; ELECTRIC CONDUCTIVITY; ELECTROSTATICS; ETCHING; LIGHT REFLECTION; MASKS; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROPROCESSOR CHIPS; PHOTOLITHOGRAPHY; PROFILOMETRY; PROJECTION SCREENS; SILICON NITRIDE; VISCOELASTICITY;

ELECTROSTATIC DEFORMATION; INTERDIGITATED FINGER ARRAYS;

LIGHT MODULATORS;

EID: 0344083388     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.08.010     Document Type: Conference Paper

References (8)

1. L.J. Hornbeck, Deformable-mirror spatial light modulator, Proc. SPIE 1150 (1989) 86-102.
2. D.M. Bloom, The grating light valve: revolutionizing display technology, Proc. SPIE 3013 (1997) 165-171.
3. J.A. van Raalte, A new Schlieren light valve for television projection, Appl. Opt. 9 (1970) 51-56.
4. R. Tepe, Theoretical Analysis of an Electrically Addressed Viscoelastic Spatial Light Modulator, Optical Society of America, 1987, pp. 1273-1282.
5. S.A. Williams, History of Eidophor projection in North America, Proc. SPIE 3013 (1997) 7-13.
6. H. Kück, W. Doleschal, A. Gehner, W. Grundke, R. Melcher, J. Paufler, R. Seltmann, G. Zimmer, Deformable micromirror devices as phase-modulating high-resolution light valves, Sens. Actuators A 54 (1996) 536-541.
7. S. Pinel, J. Tasselli, J.P. Bailbé, A. Marty, P. Puech, D. Estéve, Mechanical lapping, handling and transfer of ultra-thin wafers, J. Microelectron. Microeng. 8 (4) (1998) 338-342.
8. S. Sakarya, G. Vdovin, P.J. French, European Patent NL 45256-VB/li (2002).