Magnetron sputtering for low-temperature deposition of CdTe-based photovoltaics

Materials Research Society Symposium - Proceedings

Volumn 763, Issue , 2003, Pages 145-154

  Compaan, Alvin D ^a  

^a UNIVERSITY OF TOLEDO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODEPOSITION; ION BOMBARDMENT; MAGNETRON SPUTTERING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHOTOVOLTAIC EFFECTS; PHYSICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; QUANTUM EFFICIENCY; SOLAR CELLS; THIN FILM DEVICES; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

TANDEM STRUCTURES; VAPOR TRANSPORT DEPOSITION;

CADMIUM COMPOUNDS;

EID: 0344065569     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-763-b3.7     Document Type: Conference Paper

References (8)

1. M. Shao, A. Fischer, D. Grecu, U. Jayamaha, E. Bykov, G. Contreras-Puente, R.G. Bohn, and A.D. Compaan, "Radio-frequency-magnetron-sputtered CdS/CdTe solar cells on soda-lime glass," Appl. Phys. Lett. 62, 3045-3047 (1996).
2. Compaan, A. D.; Bohn, R. G. (1998). High Efficiency Thin-Film Cadmium Telluride Photovoltaic Cells: Final Technical Report, 31 January 1994-31 March 1998.49 pp.; NREL Report No. SR-520-25856. Full text available at: http://www.nrel.gov/docs/fy99osti/25856.pdf
3. Compaan, A. D.; Bohn, R. G. (1998). High Efficiency Thin-Film Cadmium Telluride Photovoltaic Cells: Final Technical Report, 31 January 1994-31 March 1998.49 pp.; NREL Report No. SR-520-25856. Full text available at: http://www.nrel.gov/docs/fy99osti/25856.pdf
4. M. Shao, A. Fischer, D. Grecu, U. Jayamaha, E. Bykov, G. Contreras-Puente, R.G. Bohn, and A.D. Compaan, "Radio-frequency-magnetron-sputtered CdS/CdTe solar cells on soda-lime glass," Appl. Phys. Lett. 69, 3045-3047 (1996); A.D. Compaan, M. Shao, C.N. Tabory, Z. Feng, A. Fischer, I. Matulionis, and R.G. Bohn, "RF Sputtered CdS/CdTe Solar Cells: Effects of Magnetic Field, RF Power, Target Morphology, and Substrate Temperature," Proc. 24th IEEE Photovoltaic Specialists Conference 1994, pp, 111-114 (1995).
5. M. Shao, A. Fischer, D. Grecu, U. Jayamaha, E. Bykov, G. Contreras-Puente, R.G. Bohn, and A.D. Compaan, "Radio-frequency-magnetron-sputtered CdS/CdTe solar cells on soda-lime glass," Appl. Phys. Lett. 69, 3045-3047 (1996); A.D. Compaan, M. Shao, C.N. Tabory, Z. Feng, A. Fischer, I. Matulionis, and R.G. Bohn, "RF Sputtered CdS/CdTe Solar Cells: Effects of Magnetic Field, RF Power, Target Morphology, and Substrate Temperature," Proc. 24th IEEE Photovoltaic Specialists Conference 1994, pp, 111-114 (1995).
6. X. Wu, R.G. Dhere, Y. Van, M.J. Romero, Y. Zhang, J. Zhou, C. DeHart, A. Duda, C. Perkins, and B. To, "High efficiency polycrystalline CdTe thin-film solar cells with an oxygenated amorphous CdS (a-CdS:O) window layer," Proc. 29th IEEE Photovoltaic Specialists Conference-2002, pp.531-534 (2003).
7. J. Han, T.S. Stavrinides, M. Kobayashi, R.L. Gunshor, M.M. Hagerott, and A.V. Nurmikko, "Heavy p-doping of ZnTe by molecular beam epitaxy using a nitrogen plasma source," Appl. Phys. Lett. 62, 840 (1993)
8. J. Drayton, A. Gupta, K. Makhratchev, K.J, Price, R.G. Bohn, and A.D. Compaan, "Properties of RF Sputtered ZnTe:N for Back Contact to CdS/CdTe Solar Cells," Mat. Res. Soc. Symp. Proc. 668, H5.9.1, 2001