Development of Plasma-assisted Processing for Selenization and Sulfurization of Absorber Layers

Materials Research Society Symposium - Proceedings

Volumn 763, Issue , 2003, Pages 391-396

  Kosaraju, S ^a   Repins, I ^b   Wolden, C A ^a  

^a Department of Metallurgical and Materials Engineering   (United States)

^b ITN Energy Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIMERS; DISSOCIATION; ETCHING; FREE ENERGY; INDUCTIVELY COUPLED PLASMA; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

PLASMA PROCESSING; SELENIZATION; SULFURIZATION;

SOLAR ABSORBERS;

EID: 0344036199     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-763-b8.19     Document Type: Conference Paper

References (10)

1. 2 polyscrystalline thin film solar cell," Progress in Photovoltaics: Results and Applications, 7 (1999) p. 311.
2. K. Siemer, J. Klaer, I. Luck, and D. Braunig, "Influence of crystal orientation on the device performance of CuInS2 solar cells," Proceedings of the 28th IEEE Photovoltaic Specialists Conferennce, September 17-19, 2000, Anchorage, AK, pp. 630-633.
3. L. Stolt, J.H., J. Kessler, M. Ruckh, K.-O. Velthaus, and H.-W. Schock, "ZnO/CdS/CuInSe2 thin-film solar cells with improved performance," Appl. Phys. Lett., 62 (1993) p. 597-599.
4. th Edition of the CRC Handbook of Chemistry and Physics, 78th Ed, Editor D. R. Lide, (CRC Press, Boca Raton) 1997.
5. H. Migge and J. Grzanna, "Thermochemistry in the system Cu-In-S at 723K," J. Mater. Chem., 9 (1994.) pp. 125-128.
6. M. V. Malyshev and V.M. Donnelly, "Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions," J. Appl. Phys., 87 (2000) pp. 1642-1648.
7. E. Meeks, R.S. Larson, P. Ho, C. Apblett, S. M. Han, E. Edelberg, and E. S. Aydil, "Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurement," J. Vac. Sci. Technol. A, 16 (1998) pp. 544-563.
8. S. H. Wei, S. B. Zhang, and A. Zunger, "Effects of Ga addition to CuInSe2 on its electronic, structural and defect properties," Appl. Phys. Lett., 72 (1998) pp. 3199-3201.
9. R. Birkmire and M. Engelman, "Chemical Kinetics and Equilibrium Analysis of I-III-VI Films," Proc. PV Prog. Rev., AIP Conf. Proc., CP462 (1999): p. 23-28.
10. M. A. Lieberman, and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing. (John Wiley & Sons: New York) 1994.