EDX Depths Analysis of MIS-Structures

Mikrochimica Acta

Volumn 125, Issue 1, 1997, Pages 235-238

  Fitting, Hans Joachim ^a   Kuhr, Jan Christian ^a   Goldberg, Michael ^a   Becher, Bärbel ^a   Barfels, Torsten ^a  

^a UNIVERSITY OF ROSTOCK   (Germany)

Author keywords

Depth resolution; Effective layer method; Electron probe microanalysis; MIS structures; X ray depth distribution function

Indexed keywords

EID: 0344023446     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf01246189     Document Type: Article

References (12)

1. R. Castaing, J. Descamps, J. Phys. Radium 1955, 16, 304.
2. S. J. B. Reed, Electron Microprobe Analysis, Cambridge University Press. Cambridge, MA, 1993.
3. J. L. Pouchou, F. Pichoir, in: Electron Probe Quantitation (K. F. J. Heinrich, D. E. Newbury, eds.), Plenum, New York, 1991.
4. Z. Ding, Z. Wu, J. Phys. D. Appl. Phys. 1994, 27, 387.
5. T. E. Everhart, P. H. Hoff, J. Appl. Phys. 1971, 42, 5837.
6. V. V. Makarov, Fizika i. Tekhnika Poluprovodnikov, 1975, 9, 1098.
7. H.-J. Fitting, H. Glaefeke, W. Wild, G. Neumann, J. Phys. D. Appl. Phys. 1976, 9, 2499.
8. H.-J. Fitting, H. Glaefeke, W. Wild, Phys. Stat. Sol. (A) 1977, 43, 185.
9. H.-J. Fitting, H. Glaefeke, W. Wild, Kristall Technik 1979, 43, K13.
10. H.-J. Fitting, Phys. Stat. Sol. (A) 1974, 26, 525.
11. M. Gaber, H.-J. Fitting, Phys. Stat. Sol. (A) 1984, 85, 195.
12. L. Reimer, Scanning Electron Microscopy, Springer, Berlin Heidelberg New York Tokyo, 1985.