Experimental and theoretical study of ultra-thin oxides

Semiconductor Science and Technology

Volumn 13, Issue 8 SUPPL. A, 1998, Pages

  Daniel, E S ^a   Ting, D Z Y ^a,b   McGill, T C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344000466     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/13/8A/044     Document Type: Article

References (12)

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6. Depas M, Nigam T and Heyns M M 1996 IEEE Trans. Electron. Devices 43 1499
7. Weste N H E and Eshraghian K 1993 Principles of CMOS VLSI Design (Reading, MA: Addison-Wesley)
8. Daniel E S 1997 PhD Thesis California Institute of Technology
9. Hirose M, Alay J L, Yoshida T and Miyazaki S 1996 Proc. Electrochem. Soc. 96-1 485
10. Apte P P and Saraswat K C 1994 IEEE Trans. Electron Devices 9 1595
11. Ting D Z-Y, Kirby S K and McGill T C 1993 J. Vac. Sci. Technol. 11 1738
12. Ting D Z-Y and McGill T C 1998 Appl. Phys. Lett. submitted