Ellipsometric topometry for technical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2873, Issue , 1996, Pages 172-175

  Holzapfel, Wolfgang ^a   Neuschaefer Rube, Ulrich ^a   Doberitzsch, Jochen ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

PARAMETER ESTIMATION; POLARIZATION; REFRACTIVE INDEX; SURFACE MEASUREMENT; SURFACE STRUCTURE;

ELLIPSOMETRIC PARAMETERS; MEASUREMENT PROCEDURES; MEASUREMENT SETUP; NOVEL APPLICATIONS; REFERENCE FILMS; REFLECTION ELLIPSOMETRY; SURFACE MATERIALS; TECHNICAL SURFACES;

ELLIPSOMETRY;

EID: 0343975608     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.246211     Document Type: Conference Paper

References (4)

1. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light, North-Holand Pulishing Company, 1977
2. B. Bouwhuis et al, Principles of Optical Disc Systems, Adam Hilger Ltd, Bristol and Boston, 1985
3. W. Holzapfel, U. Riß, "Computer Based High Resolution Transmission Ellipsometry, " Appl. Opt. 26, 145-153 (1987)
4. W. Holzapfel, St Neuschaefer-Rube, U. Neuschaefer-Rube, "Intracavity transmission ellipsometry for optically anisotropic components", Appl. Opt. 32, 6022-6031 (1993)