Laser machining of single-mode rib waveguides on germanosilicate slabs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2991, Issue , 1997, Pages 170-174

  Herman, Peter R ^a   Yang, Jianhao ^a   Kurosawa, Kou ^b   Yamanishi, Takayuki ^b  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF MIYAZAKI   (Japan)

Author keywords

Laser ablation; Rib waveguides; Silica glass planar waveguide

Indexed keywords

ABLATION; APPLICATIONS; DEBRIS; GLASS; INTEGRATED CIRCUITS; LASER ABLATION; LASER APPLICATIONS; OPTICAL WAVEGUIDES; OXIDES; PHOTORESISTS; PLANAR WAVEGUIDES; PULSED LASER DEPOSITION; SILICA; SURFACE ROUGHNESS; WAVEGUIDES;

LASER ETCHING; LASER MACHINING; RIB WAVEGUIDES; SILICA GLASS PLANAR WAVEGUIDE; TELECOMMUNICATION WAVELENGTHS;

LASERS;

EID: 0343913689     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.273724     Document Type: Conference Paper

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