Silicon vibration sensor for tool state monitoring working in the high acceleration range

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 194-201

  Thomas, J ^a   Kuhnhold R ^b   Schnupp, R ^a   Ryssel, H ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ETCHING; POLYSILANES; VIBRATIONS (MECHANICAL);

ANISOTROPIC ETCHINGS; PIEZORESISTIVE DETECTIONS; TOOL STATE MONITORINGS;

SILICON SENSORS;

EID: 0343878133     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00379-4     Document Type: Article

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