UV/ozone-activated growth of oxide layers on InAs(001) surfaces and oxide desorption under arsenic pressure

Applied Surface Science

Volumn 158, Issue 1, 2000, Pages 147-158

  Schafer M ^a   Naumann, W ^a   Finnberg, T ^a   Hannss, M ^a   Dutschke, A ^a   Anton, R ^a  

^a UNIVERSITY OF HAMBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; ATOMIC FORCE MICROSCOPY; DECOMPOSITION; DESORPTION; GROWTH (MATERIALS); OXIDATION; OXIDES; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SCANNING TUNNELING MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EPITAXIAL ORIENTATION; INDIUM ARSENIDE; THERMAL DESORPTION;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0343878059     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00599-1     Document Type: Article

References (21)

1. Takayanagi H., Kawakami T. Phys. Rev. Lett. 54:1985;2449.
2. Chrestin A., Matsuyama T., Merkt U. Phys. Rev. B. 49:1994;141.
3. Mönch W. On the Oxidation of III-V Compound Semiconductors. 1985;Elsevier.
4. M. Schäfer, T. Finnberg, R. Anton, unpublished results.
5. Bertru N., Nouaoura M., Bonnet J., Lassabatere L. Appl. Surf. Sci. 68:1993;357.
6. Hollinger G., Gallet D., Gendry M., Besland M.P., Joseph J. Appl. Phys. Lett. 59:1991;1617.
7. Besland M.-P., Louis P., Robach Y., Joseph J., Hollinger G., Gallet D., Victorovitch P. Appl. Surf. Sci. 56-58:1992;846.
8. Hollinger G., Skheyta-Kabbani R., Gendry M. Phys. Rev. B. 49:1994;11159.
9. Bertru N., Bacquet Y., Nouaoura M., Lassabatere L. Appl. Surf. Sci. 74:1994;331.
10. Yu C.F., Schmidt M.T., Podlesnik D.V., Yang E.S., Osgood R.M. Jr. J. Vac. Sci. Technol., A. 6(3):1988;754.
11. Hannss M., Naumann W., Anton R. Scanning. 20:1998;501.
12. Senz S., Kopperschmidt P., Langer E., Sieber H. Ultramicroscopy. 70:1997;23.
13. A. Dutschke, diploma thesis, Hamburg University, 1998.
14. Shirley D.A. Phys. Rev. B. 5:1972;4709.
15. Tanuma S., Powell C.J., Penn D.R. Surf. Interface Anal. 20:1993;77.
16. Tanuma S., Powell C.J., Penn D.R. Surf. Interface Anal. 21:1993;165.
17. Nefedov V.I. X-ray Photoelectron Spectroscopy of Solid Surfaces. 1988;VSP, Utrecht, The Netherlands.
18. Hollinger G., Robach Y. J. Vac. Sci. Technol., A. 3(6):1985;2082.
19. Procop M. J. Electron Spectrosc. Relat. Phenom. 59:1992;R1.
20. Ishikawa T., Ikoma H. Jpn. J. Appl. Phys. 31:1992;3981.
21. Lu Z.H., Bryskiewicz B., McCaffrey J., Wasilewski Z., Graham M.J. J. Vac. Sci. Technol., B. 11:1993;2033.