Radio frequency multicusp ion source development (invited)

Review of Scientific Instruments

Volumn 67, Issue 3, 1996, Pages 1302-1307

  Leung, K N ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

AC03 76SF00098; BEAM CURRENTS; BEAM EMITTANCE; BORON IONS; CUSPED GEOMETRIES; HIGH FREQUENCY DISCHARGES; HYDROGEN IONS 1 MINUS; HYDROGEN IONS 1 PLUS; ION SOURCES

Indexed keywords

EID: 0343864162     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1146702     Document Type: Conference Paper

References (13)

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7. K. N. Leung, D. A. Bachman, and D. S. McDonald, Rev. Sci. Instrum. 64, 970 (1993).RSINAK
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9. K. N. Leung, D. A. Bachman, and D. S. McDonald, Proceedings of the 1992 European Particle Accelerator Conference, Berlin, Germany, 24–28 March 1992 (unpublished).
10. C. F. Chan and J. W. Staples, Proceedings of the 1994 International Linac Conference, Tsukuba, Japan, 21–26 August 1994 (unpublished), p. 594.
11. K. N. Leung, D. S. Bachman, P. H. Herz, W. B. Kunkel, D. S. McDonald, M. T. Monroy, L. T. Perkins, D. S. Pickard, and M. D. Williams, Ion Implantation Technology-94, edited by S. Coffa, G. Feria, F. Priolo, and E. Rimini (Elsevier Science, New York, 1995).
12. M. Sarstedt, Y. Lee, K. N. Leung, L. Perkins, M. Weber, and M. D. Williams, paper presented in the sixth International Conference on Ion Sources, Whistler, BC, Canada, 10–16 September 1995, Rev. Sci. Instrum. 67 (1996), these proceedings.
13. K. N. Leung, P. Herz, W. B. Kunkel, Y. Lee, L. Perkins, D. Pickard, M. Sarstedt, M. Weber, and M. D. Williams, Proceedings of the 39th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Scottsdale, Arizona, 30 May–2 June 1995 (unpublished).