Growth mechanism and structural studies of sputtered PbTiO3 thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1185-1189

  Wasa, Kiyotaka ^a   Haneda, Yoko ^a   Satoh, Toshifumi ^b   Adachi, Hideaki ^b   Setsune, Kentaro ^b  

^a RESEARCH INSTITUTE OF INNOVATIVE TECHNOLOGY FOR THE EARTH   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIALLY GROWN; GROWTH MECHANISMS; HOMOGENEOUS MICROSTRUCTURE; IN-PLANE ALIGNMENT; MICROSCOPIC ANALYSIS; MISCUT ANGLE; PEROVSKITE THIN FILMS; SPUTTERED FILMS; SRTIO; STEP-FLOW MODELS; STRUCTURAL STUDIES;

ALIGNMENT; DEPOSITION; EPITAXIAL GROWTH; PEROVSKITE; SINGLE CRYSTALS; SURFACE ROUGHNESS; SURFACE STRUCTURE; THIN FILMS; VAPOR DEPOSITION;

FILM GROWTH;

EID: 0343829167     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580590     Document Type: Article

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