Greater than 90% QE in visible spectrum perceptible from UV to near IR Hamamatsu thinned back illuminated CCD's

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3019, Issue , 1997, Pages 2-8

  Muramatsu, Masaharu ^a   Akahori, Hiroshi ^a   Shibayama, Katsumi ^a   Nakamura, Syunsuke ^a   Yamamoto, Kouei ^a  

^a CENTRAL RESEARCH LABORATORY   (Japan)

Author keywords

Backside thinning; Flip chip bonding; Full well capacity; Grown oxide; High temperature annealing; Quantum efficiency; Rim support; Signal to noise ratio; Spectral range; Spectroscopic applications

Indexed keywords

ASTROPHYSICS; DIAGNOSIS; MEDICAL IMAGING; QUANTUM EFFICIENCY; SIGNAL TO NOISE RATIO; SOLID-STATE SENSORS; X RAYS;

BACKSIDE THINNING; FLIP CHIP BONDING; FULL WELL CAPACITY; HIGH-TEMPERATURE ANNEALING; SPECTRAL RANGE; SPECTROSCOPIC APPLICATION;

HIGH TEMPERATURE APPLICATIONS;

EID: 0343737376     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.275165     Document Type: Conference Paper

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