Low-pressure pyrolysis studies of a new phosphorus precursor: Tertiarybutylbis(dimethylamino)phosphine

Journal of Electronic Materials

Volumn 25, Issue 9, 1996, Pages 1434-1438

  Hill, C W ^a   Gedridge Jr , R W ^b   Groshens, T J ^b   Stringfellow, G B ^a   Sadwick, L P ^a  

^a UNIVERSITY OF UTAH   (United States)

^b NAVAL AIR WARFARE CENTER   (United States)

Author keywords

Phosphorous precursor; Pyrolysis studies; Tertiarybutylbis(dimethylamino) phosphine

Indexed keywords

EID: 0343701168     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02655379     Document Type: Article

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