Fabrication of ceramic microstructures by micro photoforming

International Journal of the Japan Society for Precision Engineering

Volumn 31, Issue 2, 1997, Pages 121-122

  Shan, Xuechuan ^a   Yanagisawa, Kazuhisa ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Al2o3 powders; Deresining; Fabrication; Liquid mixture; Micro photoforming; Microstructure; Photosensitive resin; Sintering; Viscosity

Indexed keywords

EID: 0343660789     PISSN: 0916782X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. W. Ehrfeld and M. Abraham : Materials for LIGA Products, Proc. IEEE MEMS Workshop, Oiso, Japan, (1994) 86.
2. T. Takagi and N. Nakajima : Photoforming Applied to Fine Machining, Proc. IEEE MEMS Workshop, Fortlauderdale, USA, (1993) 173.
3. K. Yamaguchi and T. Nakamoto : The Accuracy of Micromold Produced by UV Induced Polymerization, Trans. ASME, 116, 3, (1994) 370.