Coupled mechanical and electrostatic microactuator analysis

IEE Colloquium (Digest)

Volumn , Issue 77, 1997, Pages

  Samper, V D ^a   Sangster, A J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343580807     PISSN: 09633308     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. OPERA Software for Electromagnetic Design, Vector Fields Limited, England
2. Dhuler V R, Mehregany M and Phillips SM 1991 Modelling of harmonic side-drive micromotor Winter Annual Meeting Of The A.S.M.E., Atlanta, Ga, Usa, 01-06 Dec 1991, Conf. Code 15922 211-24
3. Dhuler V R, Mehregany M and Phillips S M 1993 An experimental technique and a model for studying the operation of harmonic side-drive motors IEEE Trans. Electron Dev. 40 (11) 1977-84
4. Trimmer W and Jebens R 1989 Harmonic electrostatic motors Sensors and Actuators 20 (35096) 17-24
5. Trimmer W and Jebens R 1989 An operational harmonic electrostatic motor Micro Electro Mech. Sys.: An Investigation Of Micro Structures, Sensors, Actuators, Machines And Robots, Salt Lake City, Ut, Usa, 20-22 Feb 1989, Conf. Code 12354 13-6