Copolymers of camphorsulfonyloxymaleimide and t-BOC protected vinyllactams for applications as single-component resists

Polymer Bulletin

Volumn 39, Issue 4, 1997, Pages 423-430

  Kim, Sang Tae ^b   Kim, Jin Baek ^a   Jung, Min Ho ^a   Ahn, Kwang Duk ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343432108     PISSN: 01700839     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002890050168     Document Type: Article

References (13)

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